Product laser
Products
Supports G6-generation OLED TFT glass substrates
High material compatibility: capable of repairing all OLED process film layers (including P-Si, Mo, Ti, Al, ITO, Ag, etc.)
Flexible configuration tailored to customer-specific process requirements
Exceptional repair success rate: >99.9%
Precision optical path control system with high-accuracy alignment and positioning
Integrated CIM system for intelligent closed-loop process feedback
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Specification |
Details |
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Equipment Dimensions (L×W×H) |
4100 mm × 3600 mm × 3400 mm |
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Cleanroom Environment |
Class 100 or better |
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Supported Glass Substrate |
Compatible with Gen 4.5 / Gen 6 glass |
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Laser Output Stability |
≤ 2% RMS |
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Platform Accuracy |
Repeatability ≤ ±1 μm; Positioning Accuracy < ±3 μm |
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Supported Film Types |
P-Si, Mo, Ti, Al, ITO, Ag, etc. |
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Throughput (Cycle Time) |
≤ 60 seconds with lifting mechanism |
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*Carrier to substrate alignment, by high contrast chrome mask pattern |
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